The benchmark Nikkei 225 index rose 0.49 percent, or 136.93 points, to 27,970.22, while the broader Topix index gained 0.64 percent, or 12.42 points, to 1,938.04
In Tokyo, chip-testing equipment manufacturer Advantest jumped 1.79 percent to 10,800 yen and electronic parts maker Kyocera was up 1.43 percent at 7,210 yen.
Among major shares in Tokyo, shipping firm Nippon Yusen surged 7.30 percent to 3,380 yen and its rival Mitsui O.S.K. lines climbed 7.45 percent to 3,605 yen.
Takeda Pharmaceutical jumped 3.18 percent to 3,793 yen after reports said its partner US biotech firm Moderna is planning to file for approval of its coronavirus vaccine in Japan as early as Friday.
In Tokyo trading, market heavyweight SoftBank Group jumped 1.73 percent to 10,530 yen while Uniqlo casual wear operator Fast Retailing gained 0.14 percent to 104,900 yen.
Chip-testing equipment maker Advantest surged 5.45 percent to 8,710 yen, while chip-making equipment manufacturer Tokyo Electron climbed 5.27 percent to 42,950 yen.